These are heat blisters. Heat blisters appear before you become burned (as in touching fire, not "sunburned").
Next time, stay in the bed/booth for a shorter period of time, and use a moisturizing tanning lotion. If you use a "tingle" lotion, wait until after you have hit your tanning plateau, as it may cause blistering beforehand.
In the mean time, you can treat them with regular Aloe; the kind that comes in a big bottle of green gel. It will keep the itching from bothering you too much, and hydrate your burned skin.
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