What caused Robespierre to fall from power?

Robespierre began killing more and more people who MAY have been against the consitution in the slightest way. He started killing people of his grouped, even if they were just suggesting that thing were getting out of control. Finally, everyone came together and saught to arrest him. He tried to commit suicide, but he only blew his jaw off with a gun and they still carried him to jail. They beheaded him in front of everyone.