Which Greek god created humans?

Uranus was the sky (personification). He may have been the offspring of Aether, Hemera--Air and Day; or the son of Nyx, or Night. The god Aether also may have been a personification of sky.

Aether's parents may have been Erebus and Nyx, or Khaos or Akmon depending on which classical historian one reads.

--information from Wikipedia