What equipment do you need for lithography?

For lithography, essential equipment includes a mask aligner or stepper for projecting patterns onto the photoresist-coated substrate, a spin coater for applying the photoresist evenly, and an exposure system, such as a UV light source. Additionally, a developer system is necessary for developing the exposed photoresist, and a cleaning station is crucial for preparing substrates. Finally, inspection tools like optical microscopes or scanning electron microscopes are used to verify pattern quality.